2.03
[]. Martin Rose, et al. In situ reaction mechanism studies on ozone-based atomic layer deposition of Al(2)O(3) and HfO(2). ACS Appl Mater Interfaces. 200 Feb;2(2):347-50.
H225-H260-H302-H34-H335
P20-P223-P23+P232-P233-P240-P24-P242-P243-P260-P26-P264-P270-P27-P280-P30+P330+P33-P304+P340-P330-P363-P370+P378-P402+P404-P405-P50